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The effect of dopants on the texture formation in MBE-grown polysilicon films

✍ Scribed by T. A. Gracheva; N. D. Malygin; D. V. Shengurov; V. G. Shengurov


Book ID
110125056
Publisher
Springer
Year
2000
Tongue
English
Weight
29 KB
Volume
45
Category
Article
ISSN
1063-7842

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