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The effect of different electrode structures on the dielectric properties of lanthanum-doped lead titanate ferroelectric thin films

✍ Scribed by Liu, Hong ;Pu, Zhaohui ;Zhu, Xiaohong ;Xiao, Dingquan ;Zhu, Jianguo

Book ID
107476197
Publisher
Higher Education Press and Springer
Year
2007
Tongue
English
Weight
353 KB
Volume
1
Category
Article
ISSN
1673-7377

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## Pb La Ti O (PLT10) thin film was prepared by an MOD process on ZrO / Si substrate. The studies 0.9 0.1 0.975 3 2 showed that the ZrO buffer layer with a thickness of 0.1 mm is not thermal stable and O atoms in O 2 2 atmosphere could diffuse into Si substrate through grain boundaries to form S