The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

✍ Scribed by J. Wagner; C. Mitterer; M. Penoy; C. Michotte; W. Wallgram; M. Kathrein

• Book ID: 113656348
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 839 KB
• Volume: 26
• Category: Article
• ISSN: 0263-4368
• DOI: 10.1016/j.ijrmhm.2007.01.010