9732045 The effects of aromatics and sul
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Article
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1998
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Elsevier Science
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English
⚖ 139 KB
A novel type of silicon bulk micromachined flow sensor was fabricated and characterized. Like the classic Prandtl tube, it realize flow velocity detection by measurement of the pressure different (Ptotal --Pstat = Pdyn) between stagnant fluid pressure (Ptotal) in front of the sensor and static press