9732045 The effects of aromatics and sulfur in gasoline on exhaust emission : Atsushi Kameoka, Fumiko Tsuruga, Kenzo Hosoi (Japan Automobile Research Institute. Inc.)

• Book ID: 104342713
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 139 KB
• Volume: 19
• Category: Article
• ISSN: 0389-4304
• DOI: 10.1016/s0389-4304(98)90290-9

✦ Synopsis

A novel type of silicon bulk micromachined flow sensor was fabricated and characterized. Like the classic Prandtl tube, it realize flow velocity detection by measurement of the pressure different (Ptotal --Pstat = Pdyn) between stagnant fluid pressure (Ptotal) in front of the sensor and static pressure (Ps,at) within the flow around the sensor. This pressure difference results in an electrode deflection of an integrated capacitor. The sensor basically consists of a two-layer structure. The upper silicon wafer plate, structured by wet anisotropic etching, is anodically bonded to the lower Pyrex glass plate. Results of first wind tunnel experiments are presented, confirming the sensor's operation principle.