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The effect of annealing on electrical properties of fluorinated amorphous carbon films

✍ Scribed by Wu, Zhenyu; Yang, Yintang; Wang, Jiayou

Book ID: 122834873
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 332 KB
Volume: 17
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2007.11.001

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