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The effect of adsorbed and recoil-implanted oxygen on sputtered excited atoms

✍ Scribed by I.S.T. Tsong; S. Tsuji

Publisher: Elsevier Science
Year: 1980
Weight: 48 KB
Volume: 94
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(80)90351-5

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