The dissociative adsorption of ammonia on Si(100)
β Scribed by P.A. Taylor; R.M. Wallace; W.J. Choyke; M.J. Dresser; J.T. Yates Jr.
- Publisher
- Elsevier Science
- Year
- 1989
- Weight
- 421 KB
- Volume
- 215
- Category
- Article
- ISSN
- 0167-2584
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π SIMILAR VOLUMES
First principles calculations of the potential energy surface for Hz dissociation on the ( 100) surface of Cu are presented, based on a plane-wave pseudo-potential formalism within local density functional theory. Among dissociation paths with the molecule parallel to the surface, the most favourabl
## Ε½ . Dissociative adsorption of monomethylsilane MMS , a promising precursor gas for low-temperature SiC, has been Ε½ . Ε½ . investigated on Si 100 by using temperature-programmed desorption TPD method after its comparison with Hr and Ε½ . Ε½ . C H rSi 100 surfaces. For both MMSr and C H rSi 100 ,