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The diffusion approximation in modelling impurity redistribution during sputtering

✍ Scribed by G. Carter

Book ID: 113287559
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 498 KB
Volume: 115
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01558-2

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