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The determination of three-dimensional stress tensors on multilayer thin films

✍ Scribed by M. D. Yeager; C. O. Ruud; P. C. Chen

Book ID
112373684
Publisher
Springer-Verlag
Year
1991
Tongue
English
Weight
504 KB
Volume
10
Category
Article
ISSN
0195-9298

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## Abstract Ion‐platted thin copper films were examined for residual stresses and texture by X‐ray diffraction. The complete orientation distribution functions were determined and sharp (111)‐fibre textures were found. The strains were measured by grazing incidence diffraction. The stress tensors w