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The determination of the geometric parameters of the extraction system in an rf ion source

โœ Scribed by Ma Mingxiu; K.G. Stephens; B.J. Sealy; J.E. Mynard

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
388 KB
Volume
288
Category
Article
ISSN
0168-9002

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A helicon and a multicusp version of radio-frequency ion sources with compact permanent magnet systems have developed and tested to show the following performance data: plasma density of 10 11 -9โ€ข10 12 cm ร€3 , pressure of 2-10 mTorr, beam current densities of 10-130 mA/cm 2 , brightness $100 A/(m 2