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Development of the RF ion source for use in accelerator-based microprobes

✍ Scribed by V. Miroshnichenko; S. Mordyk; D. Shulha; V. Storizhko; V. Voznyy

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
755 KB
Volume
260
Category
Article
ISSN
0168-583X

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✦ Synopsis

A helicon and a multicusp version of radio-frequency ion sources with compact permanent magnet systems have developed and tested to show the following performance data: plasma density of 10 11 -9•10 12 cm À3 , pressure of 2-10 mTorr, beam current densities of 10-130 mA/cm 2 , brightness $100 A/(m 2 rad 2 eV), energy spread 8-30 eV and an RF power input into the plasma of 40-400 W. Possibilities for a further increase in the differential brightness of the RF ion sources are discussed.

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