The detection of microcontaminants in semiconductor process fluids using an acoustic technology: Don L. Tolliver, Nigel Davenport and Leigh R. Abts

• Book ID: 104157386
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 99 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(85)80243-3

✦ Synopsis

This paper shows how the fault models introduced in the parent paper may be applied to a commercial device.

After discussion of typical EPROM architecture and circuitry, it is shown that most of the faults are detected by the proposed test sequence; additional tests are suggested to detect those faults in the peripheral circuitry which are not described by the "symmetric decoder fault" model.

Although developed with reference to a specific architecture, most of the results of this work have general validity, since the analysed arachitecture is common to the great majority of available devices.