The detection of microcontaminants in semiconductor process fluids using an acoustic technology : Don L. Tolliver, Nigel Davenport and Leigh R. Abts. Solid St. Technol., 116 (September 1982)

The detection of microcontaminants in se

The detection of microcontaminants in semiconductor process fluids using an acoustic technology: Don L. Tolliver, Nigel Davenport and Leigh R. Abts

📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 99 KB

This paper shows how the fault models introduced in the parent paper may be applied to a commercial device. After discussion of typical EPROM architecture and circuitry, it is shown that most of the faults are detected by the proposed test sequence; additional tests are suggested to detect those fa