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The detection and compensation of tool wear in process

✍ Scribed by Dou Shouszhi; Du Yanting; Shi Weixiang

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
345 KB
Volume
48
Category
Article
ISSN
0924-0136

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To address the need to produce sub-50 nm scale features for manufacturing of nano / bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active too