Understanding Dielectric Breakdown and Related Tool Wear Characteristics in Nanoscale Electro-Machining Process
✍ Scribed by K.R. Virwani; A.P. Malshe; K.P. Rajurkar
- Publisher
- International Academy for Production Engineering
- Year
- 2007
- Tongue
- English
- Weight
- 406 KB
- Volume
- 56
- Category
- Article
- ISSN
- 0007-8506
No coin nor oath required. For personal study only.
✦ Synopsis
To address the need to produce sub-50 nm scale features for manufacturing of nano / bio devices and systems, a nanoscale electro-machining (nano-EM) process is being studied. This paper reports unique field induced effects on a tungsten tool. During machining, the tungsten atoms leave the active tool tip in the form of clusters. Upon machining, the tool tip end radius was sharper (~20nm after in comparison with ~35nm before). The tool surface was chemically modified to a nanocrystalline matrix of tungsten oxide and tungsten carbide. The tool sharpening and the formation of the nanocrystalline matrix are expected to prolong the tool life in the nano-EM process in a manufacturing environment.