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The design and simulation of a novel out-of-plane micro electrostatic actuator

✍ Scribed by Chingfu Tsou

Publisher: Springer-Verlag
Year: 2006
Tongue: English
Weight: 615 KB
Volume: 12
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0107-1

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