✦ LIBER ✦

The design and performance of planar magnetron sputtering cathodes

✍ Scribed by A.G. Spencer; C.A. Bishop; R.P. Howson

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 427 KB
Volume: 37
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(87)90026-1

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion energies at the cathode of the DC pl

Ion energies at the cathode of the DC planar magnetron sputtering discharge

✍ D. Czekaj; E. K. Hollmann; A. B. Kozirev; V. A. Volpyas; A. G. Zaytsev 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 331 KB

Design aspects and performance evaluatio

Design aspects and performance evaluation of a planar magnetron

✍ G Mohanrao; S Mohan 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 197 KB

Performance of a planar magnetron sputte

Performance of a planar magnetron sputtering apparatus with complex targets

✍ Qing-Ming Chen; Yu-Dian Fan; Heng-De Li 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 903 KB

Performance characteristics of a new hig

Performance characteristics of a new high rate magnetron sputtering cathode

✍ Walter H. Class 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 318 KB

Electrochemical performance of magnetron

Electrochemical performance of magnetron sputter deposited LiFePO4-Ag composite thin film cathodes

✍ K.-F. Chiu; C.-L. Chen 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 892 KB

LiFePO 4 thin films have been sputtered from a pure LiFePO 4 target onto Ag/SS, Ag/Si 3 N 4 /Si and Si 3 N 4 /Si substrates. All of the deposited films were annealed at 973 K for 1 hr in H 2 /Ar (5 %) atmosphere. Substrate induced microstructural and crystallographic evolutions have been observed by

Technical note: Design and performance o

Technical note: Design and performance of a movable post-cathode magnetron sputtering system for making PBFA II accelerator ion sources

✍ D.M. Mattox; R.E. Cuthrell; C.R. Peeples; P.L. Dreike 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 559 KB