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The deposition and microstructure of broad beam, ion sputtered titanium nitride coatings

✍ Scribed by C.V. Cooper; R.A. Wagner

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 847 KB
Volume: 197
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90240-x

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