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The dependence of the optical property of Ti anodic oxide film on its growth rate by ellipsometry

✍ Scribed by T. Ohtsuka; N. Nomura


Book ID
117087184
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
649 KB
Volume
39
Category
Article
ISSN
0010-938X

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Impedance measurements and photocurrent spectroscopy have been used to examine the dependence on growth rate of the solid state properties of thin ( -c 20 nm) anodic oxide films on titanium. At room temperature, the relative permittivity and defect concentration profiles in the oxide were found to d