The density determination of rf plasma polymers
β Scribed by W. W. Knickmeyer; B. W. Peace; K. G. Mayhan
- Publisher
- John Wiley and Sons
- Year
- 1974
- Tongue
- English
- Weight
- 136 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0021-8995
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Application of radio-frequency (RF) plasma as an alternative technology for the decomposition of carbon dioxide with methane gas is demonstrated. The results of this study revealed that in plasma, the best CO 2 /CH 4 /Ar decomposition fraction of carbon dioxide was 60Γ0%, which occurs around 316Β‘C i
In this work a single Langmuir probe has been used to determine in-situ the plasma electronic temperature (T e ) and the electronic density (h e ) of an rf magnetron sputtering system used to grow CN x films. Sodium chloride substrates and a carbon target (99.999%) in a mixture of Ar/N 2 were used.