๐”– Bobbio Scriptorium
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The cutting of compositions

โœ Scribed by B. De Baets; E. Kerre


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
817 KB
Volume
62
Category
Article
ISSN
0165-0114

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Ultraprecision cutting of photoresist/go
โœ J. Yan ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› International Academy for Production Engineering ๐ŸŒ English โš– 442 KB

Tokyo ## Effect of cutting speed on photoresist cutting Cutting tests were performed on photoresist-coated wafers at various cutting speeds. Fig. 4 shows Nomarski micrographs of the