✦ LIBER ✦
Ultraprecision cutting of photoresist/gold composite microstructures
✍ Scribed by J. Yan
- Publisher
- International Academy for Production Engineering
- Year
- 2011
- Tongue
- English
- Weight
- 442 KB
- Volume
- 60
- Category
- Article
- ISSN
- 0007-8506
No coin nor oath required. For personal study only.
✦ Synopsis
Tokyo
Effect of cutting speed on photoresist cutting
Cutting tests were performed on photoresist-coated wafers at various cutting speeds. Fig. 4 shows Nomarski micrographs of the