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The crystalline qualities of silicon layers formed by solid phase epitaxial growth

✍ Scribed by W.F. Tseng; Z.L. Liau; S.S. Lau; M.-A. Nicolet; J.W. Mayer


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
747 KB
Volume
46
Category
Article
ISSN
0040-6090

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