The correlation between the chemical compositions and optical properties of TiSixNy as an embedded layer for AttPSM in 193 nm

✍ Scribed by Wen-an Loong; Cheng-ming Lin; Show-ping Tseng; Wen-long Yeh

• Book ID: 114155335
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 221 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00540-8