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The Chemistry of Scandium. IV. The Structure of Scandium Oxinate

โœ Scribed by Pokras, L.; Kilpatrick, M.; Bernays, P. M.


Book ID
126408519
Publisher
American Chemical Society
Year
1953
Tongue
English
Weight
299 KB
Volume
75
Category
Article
ISSN
0002-7863

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Thin films of scandium oxide, Sc 2 O 3 , have been deposited by liquid-injection MOCVD using tetrahydrofuran solutions of the novel precursors Sc(tmod) 3 (tmod = 2,2,7-trimethyloctane-3,5-dionate) and Sc(mhd) 3 (mhd = 6-methylheptane-2,4-dionate). The properties of the films are compared to those of