Developing the Chemistry of Novel Scandium β-Diketonates for the MOCVD of Scandium-Containing Oxides

✍ Scribed by K. A. Fleeting; H. O. Davies; A. C. Jones; P. O'Brien; T. J. Leedham; M. J. Crosbie; P. J. Wright; D. J. Williams

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 232 KB
• Volume: 5
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/(sici)1521-3862(199912)5:6<261::aid-cvde261>3.0.co;2-2

✦ Synopsis

Thin films of scandium oxide, Sc 2 O 3 , have been deposited by liquid-injection MOCVD using tetrahydrofuran solutions of the novel precursors Sc(tmod) 3 (tmod = 2,2,7-trimethyloctane-3,5-dionate) and Sc(mhd) 3 (mhd = 6-methylheptane-2,4-dionate). The properties of the films are compared to those of films grown using the conventional precursor Sc(thd) 3 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionate). Oxide growth was observed over a wide range of substrate temperatures, from 400 C to at least 600 C, and the films were shown (by Auger electron spectroscopy) to be Sc 2 O 3 with no detectable carbon impurity. The properties of the scandium b-diketonates were found to vary with the nature of the b-diketonate group and the use of the asymmetric tmod and mhd groups led to precursors with lower melting points and higher volatilities than the Sc(thd) 3 source.