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ChemInform Abstract: Developing the Chemistry of Novel Scandium β-Diketonates for the MOCVD of Scandium-Containing Oxides.

✍ Scribed by Kirsty A. Fleeting; Hywel O. Davies; Anthony C. Jones; Paul O'Brien; Timothy J. Leedham; Michael J. Crosbie; Peter J. Wright; Dennis J. Williams

Publisher: John Wiley and Sons
Year: 2010
Weight: 34 KB
Volume: 31
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200007029

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✦ Synopsis

Abstract

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Thin films of scandium oxide, Sc 2 O 3 , have been deposited by liquid-injection MOCVD using tetrahydrofuran solutions of the novel precursors Sc(tmod) 3 (tmod = 2,2,7-trimethyloctane-3,5-dionate) and Sc(mhd) 3 (mhd = 6-methylheptane-2,4-dionate). The properties of the films are compared to those of

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