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The chemisorption and reaction of GeCl4 with Si(100)

✍ Scribed by D.A. Lapiano-Smith; F.R. McFeely

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 328 KB
Volume: 225
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90153-g

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