The Physics of Submicron Lithography
โ Kamil A. Valiev (auth.)
๐ Library
๐
1992
๐ Springer US
๐ English
<p>This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology o
