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The application of scanning probe microscopy in materials science studies

✍ Scribed by Bryan D. Huey; Wolfgang Sigmund

Book ID
107523100
Publisher
The Minerals, Metals & Materials Society
Year
2007
Tongue
English
Weight
358 KB
Volume
59
Category
Article
ISSN
1047-4838

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Scanners for scanning probe microscopy (SPM) are generally built of piezos, which are used to move the sample with respect to the tip in the x-, y-or z-direction or vice versa. Piezoelectric scanners are usually height calibrated by the manufacturer with laser interferometry, with a calibration grid