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Application of neural networks to a scanning probe microscopy system

✍ Scribed by L. Hadjiiski; R. Linnemann; M. Stopka; E. Oesterschulze; I. Rangelow; R. Kassing

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
799 KB
Volume
264
Category
Article
ISSN
0040-6090

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## Abstract Scanning probe microscopy (SPM) is a widely used experimental technique for characterizing and fabricating nanostructures on surfaces. In particular, due to its ability to spatially map variations in materials properties with nanometer spatial resolution, SPM is particularly well suited