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The annealing behaviour of argon and boron dual-implanted silicon and its electrical performance

✍ Scribed by Zhu Jinliang; Li Xinnian; Zhou Zuyao; Yu Zhenwen; Wu Xinhai; Lin Xing; Beng Ruizhong


Book ID
113281994
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
397 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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