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The ambients produced by oxygen and water vapour in uhv systems

โœ Scribed by J.J. Quinn; R.B. Elliott

Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
609 KB
Volume
27
Category
Article
ISSN
0042-207X

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โœฆ Synopsis

A pure gas inlet system is described. The problems associated with the maintenance of gas purity in an ion-pumped system are discussed generally. Mass spectral data for the ambients due to admission of pure oxygen and water vapour are presented; and the use of a computer program for converting the mass spectra to gas composition is discussed. The gas purity obtained is compared with other data from the literature, and a significant improvement is reported. Some tentative suggestions as to the origin of the gas impurities are made.

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