The addition of aluminium to ruthenium liner layers for use as copper diffusion barriers

✍ Scribed by McCoy, A.P.; Bogan, J.; Walsh, L.; Byrne, C.; Casey, P.; Hughes, G.

• Book ID: 122128463
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 412 KB
• Volume: 307
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2014.04.097