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The 3-D IC with 4-layer structure for the fast range sensing system

✍ Scribed by Y. Akasaka; Y. Inoue; M. Nakaya; T. Nishimura


Book ID
103598412
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
211 KB
Volume
15
Category
Article
ISSN
0167-9317

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In order to highlight the way in which atomic layer deposition (ALD) methods may be used to prepare complex 3D structures, we consider the modification of photonic crystals such as synthetic opals that may be readily prepared from monodispersed assemblies of colloidal particles. In such materials it