Tetrahydropyranyl protected polyhydroxy-styrene for a chemically amplified deep u.v. resist

✍ Scribed by Nobuaki Hayashi; Takumi Ueno; Simon Hesp; Minoru Toriumi; Takao Iwayanagi

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 428 KB
• Volume: 33
• Category: Article
• ISSN: 0032-3861
• DOI: 10.1016/0032-3861(92)91053-5