Testing of MEMS capacitive accelerometer structure through electro-static actuation

Boundary characterization of MEMS struct

Boundary characterization of MEMS structures through electro-mechanical testing

✍ G. Rinaldi; M. Packirisamy; I. Stiharu 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 1009 KB

Micro-electro-mechanical-systems (MEMS) are coupled electro-mechanical microsystems used in many different sensing and actuation applications. The mechanical characteristics of the microsystem depend in large part to the choice of material and microfabrication process. In microsystems where there ar

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Micromachined accelerometer based on convection heat transfer

✍ Leung, A.M.; Jones, J.; Czyzewska, E.; Chen, J.; Woods, B. 📂 Article 📅 1998 🏛 IEEE ⚖ 732 KB

[IEEE IEEE Eleventh Annual International

[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Single mask lateral tunneling accelerometer

✍ Hartwell, P.G.; Bertsch, F.M.; Miller, S.A.; Turner, K.L.; MacDonald, N.C. 📂 Article 📅 1998 🏛 IEEE ⚖ 670 KB