Test device structures for integrated circuit design, process technology development and evaluation : A. Srivastava. Microelectron. Reliab.22 (2), 195 (1982)

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 131 KB
• Volume: 23
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(83)91071-5