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Tensile strength of aluminium nitride films

✍ Scribed by Gang Zong, Deng; Wo Ong †, Chung; Aravind, Manju; Po Tsang, Mei; Loong Choy, Chung; Lu, Deren; Ma, Dejun


Book ID
127314959
Publisher
Taylor and Francis Group
Year
2004
Tongue
English
Weight
313 KB
Volume
84
Category
Article
ISSN
1478-6435

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