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DC Plasma Nitridation of Thin Aluminium Films

✍ Scribed by Jung, T. ;Roth, L.

Publisher: John Wiley and Sons
Year: 1984
Tongue: English
Weight: 166 KB
Volume: 85
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210850141

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