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Tensile properties of aluminum/alumina multi-layered thin films

✍ Scribed by G. T. Mearini; R. W. Hoffman

Book ID
112820121
Publisher
Springer US
Year
1993
Tongue
English
Weight
638 KB
Volume
22
Category
Article
ISSN
0361-5235

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## Abstract Presented in this paper is a study of the biocompatibility of an atomic layer‐deposited (ALD) alumina (Al~2~O~3~) thin film and an ALD hydrophobic coating on standard glass cover slips. The pure ALD alumina coating exhibited a water contact angle of 55Β° Β± 5Β° attributed, in part, to a hi