Tris(dialkylamino)aluminums: Syntheses, characterization, volatility comparison and atomic layer deposition of alumina thin films

✍ Scribed by Casey R. Wade; Carter Silvernail; Chiranjib Banerjee; Axel Soulet; James McAndrew; John A. Belot

• Book ID: 113791116
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 418 KB
• Volume: 61
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/j.matlet.2007.04.009