✦ LIBER ✦

Tencor instruments

✍ Scribed by Materials Research Corporation

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 109 KB
Volume: 28
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(78)90095-7

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Tencor instruments introduces new genera

Tencor instruments introduces new generation surfscan

📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 141 KB

Tencor Instruments introduces surface pr

Tencor Instruments introduces surface profiler for flat panel display market

📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 260 KB

Tencor Instruments announces new atomic

Tencor Instruments announces new atomic force metrology system for semiconductor applications

📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 137 KB

KLA-Tencor chairman retires

📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 207 KB

Interactive 3D displays

✍ Tencor Instruments 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 120 KB

KLA-Tencor Corp has moves into metal met

KLA-Tencor Corp has moves into metal metrology

📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 491 KB

KLA-Tencor Corp has moved into Rudolph Technologies' domain with an inline metal film metrology tool. Still in beta testing, the Metrix 100 uses an electron beam, x-ray detectors and software algorithms to measure both film thickness and film composition.