✦ LIBER ✦
KLA-Tencor Corp has moves into metal metrology
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 491 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0961-1290
No coin nor oath required. For personal study only.
✦ Synopsis
KLA-Tencor Corp has moved into Rudolph Technologies' domain with an inline metal film metrology tool. Still in beta testing, the Metrix 100 uses an electron beam, x-ray detectors and software algorithms to measure both film thickness and film composition.