Effect of seed layer on the sensitivity
โ
K.M. Chui; A.O. Adeyeye; Mo-Huang Li
๐
Article
๐
2008
๐
Elsevier Science
๐
English
โ 639 KB
We investigate systematically the effects of seed layer thickness on the sensitivity of exchange biased planar Hall sensors. The sensors consist of Ni 80 Fe 20 (t s )/Fe 50 Mn 50 (20 nm)/Ni 80 Fe 20 (20 nm) trilayers deposited on silicon substrates by sputtering, with t s varied from 0 nm to 50 nm.