𝔖 Bobbio Scriptorium
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Temperature effect on the glancing angle deposition of Si sculptured thin films

✍ Scribed by Patzig, Christian; Rauschenbach, Bernd


Book ID
126948150
Publisher
AVS (American Vacuum Society)
Year
2008
Tongue
English
Weight
866 KB
Volume
26
Category
Article
ISSN
0734-2101

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