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Temperature dependence of ZnO thin films grown on Si substrate

✍ Scribed by Y. Y. Kim; C. H. Ahn; S. W. Kang; B. H. Kong; S. K. Mohanta; H. K. Cho; J. Y. Lee; H. S. Kim


Publisher
Springer US
Year
2007
Tongue
English
Weight
339 KB
Volume
19
Category
Article
ISSN
0957-4522

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## Abstract ZnO thin films doped with Li (ZnO:Li) were deposited onto SiO~2~/Si (100) substrates by direct‐current sputtering technique in the temperature range from room temperature to 500 Β°C. The crystalline structure, surface morphology and composition, and optical reflectivity of the deposited