Temperature dependence of silicon precipitation in thin surface layer of Si3N4 induced by excimer laser irradiation

✍ Scribed by Kou Kurosawa; Kazuo Nakamae; Yasuo Takigawa; Wataru Sasaki; Yoshiaki Kato; Masahiro Okuda

• Book ID: 113287784
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 641 KB
• Volume: 116
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(96)00079-1