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Temperature Dependence of Electron Beam Induced Epitaxial Crystallization of Silicon

✍ Scribed by Hoehl, D. ;Heera, V. ;Bartsch, H. ;Wollschläger, K. ;Skorupa, W. ;Voelskow, M.

Book ID
105382362
Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
154 KB
Volume
122
Category
Article
ISSN
0031-8965

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